Viewport Shutter SF Series
Viewport Shutter SF Series
Film deposition processes such as evaporation, sputtering, MBE, and CVD Prevent film deposition and damage to the viewport, which can be problematic in processes involving organic gases. 【Features】 ○ Usable with various ultra-high vacuum devices such as MBE equipment due to the conflat flange specification. ○ The rotary feedthrough uses the RFT series, which supports 200°C baking, allowing for high-temperature baking. ○ Compatible with φ70CF to φ203CF. ○ Can close with almost no gaps, effective for samples with high vapor pressure. ○ Optional shield glass and RHEED screen can be installed. ○ The opening and closing direction can be changed easily with simple reconfiguration. ○ Custom-sized flanges can also be manufactured. ● For other functions and details, please download the catalog.
- Company：アリオス
- Price：Other
